Tradeoffs in MEMS materials

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2881, Issue , 1996, Pages 160-170

  Cabuz, Cleopatra ^a  

^a HONEYWELL TECHNOLOGY CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE INJECTION; MICROACTUATORS; MICRORESONATORS;

ACTUATORS; CONTROL SYSTEMS; DESIGN; DIELECTRIC MATERIALS; ELECTROSTATICS; LOW TEMPERATURE ENGINEERING; SEMICONDUCTING SILICON;

MICROELECTROMECHANICAL DEVICES;

EID: 0030381421     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (22)