Stability of microelectromechanical devices for electrical metrology

IEEE Transactions on Instrumentation and Measurement

Volumn 50, Issue 6, 2001, Pages 1499-1503

  Kyynäräinen, Jukka ^a   Oja, Aarne S ^a   Seppä, Heikki ^a  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

Electrical metrology; MEMS; Microelectromechanical systems

Indexed keywords

CRYSTALLINE MATERIALS; ELECTRIC CURRENTS; ELECTRIC FIELDS; ELECTRIC INVERTERS; ELECTRIC VARIABLES MEASUREMENT; ELECTRODES; ELECTROSTATICS; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; SPURIOUS SIGNAL NOISE; SYSTEM STABILITY; VOLTAGE DIVIDERS;

CHARGE FLUCTUATIONS; DC CURRENT REFERENCE; DC-AC VOLTAGE REFERENCE; ELECTROSTATIC FORCE; LOW FREQUENCY VOLTAGE DIVIDER; MICROMACHINED ELECTRODES; NOISE LEVEL; WAVE DETECTOR;

MICROELECTROMECHANICAL DEVICES;

EID: 0035720933     PISSN: 00189456     EISSN: None     Source Type: Journal    
DOI: 10.1109/19.982934     Document Type: Article

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