Nanofabrication based on MEMS technology

IEEE Sensors Journal

Volumn 6, Issue 3, 2006, Pages 686-690

  Wang, Yuelin ^a,b   Li, Xinxin ^b   Li, Tie ^b   Yang, Heng ^b   Jiao, Jiwei ^b  

^a IEEE   (China)

^b INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

Author keywords

Microelectromechanical system (MEMS); Nanoelectromechanical system (NEMS); Nanofabrication

Indexed keywords

NANO BEAMS;

ANISOTROPIC ETCHING; ELASTIC MODULI; MEMS; NANOTECHNOLOGY; NANOTIPS; NANOWIRES; REACTIVE ION ETCHING;

NEMS;

EID: 33947120658     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2006.874034     Document Type: Article

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