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Volumn 87, Issue 1, 2007, Pages 77-79
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Processing of transparent materials using visible nanosecond laser pulses
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Author keywords
[No Author keywords available]
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Indexed keywords
ALUMINUM;
DRY ETCHING;
DYE LASERS;
FUSED SILICA;
MICROMACHINING;
MICROOPTICS;
SCANNING ELECTRON MICROSCOPY;
TRANSPARENCY;
LASER INDUCED BACKSIDE DRY ETCHING (LIBDE);
MICROPROCESSING;
NANOSECOND LASER LIGHTS;
TRANSPARENT MATERIALS;
LASER PULSES;
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EID: 33847192540
PISSN: 09478396
EISSN: 14320630
Source Type: Journal
DOI: 10.1007/s00339-006-3847-y Document Type: Article |
Times cited : (19)
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References (22)
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