Laser etching of transparent materials at a backside surface adsorbed layer

Applied Surface Science

Volumn 252, Issue 13 SPEC. ISS., 2006, Pages 4763-4767

  Bohme R ^a   Hirsch, D ^a   Zimmer, K ^a  

^a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

Author keywords

Adsorbed layer; Excimer laser; Fused silica; Laser etching; Magnesium fluoride; MgF 2; Quartz; Sapphire

Indexed keywords

ADSORPTION; EXCIMER LASERS; FUSED SILICA; IRRADIATION; MAGNESIUM COMPOUNDS; QUARTZ; SAPPHIRE; SURFACE ROUGHNESS;

ADSORBED LAYER; EXCIMER LASER; LASER ETCHING; MAGNESIUM FLUORIDE;

ETCHING;

EID: 33646553058     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2005.06.058     Document Type: Article

References (15)

1. Skinner J.G., Groves T.R., Novembre A., Pfeiffer H., and Singh R. Photomask fabrication procedures an limitations. In: Rai-Choudhury P. (Ed). Handbook of Microlithography, Micromachining and Microfabrication vol. PM39 (1997), SPIE 377
2. Zimmer K., and Braun A. Excimer laser machining for 3D-surface structuring. In: Peled A. (Ed). Photo-Excited Processes, Diagnostics and Applications (2003), Kluwer, Boston 301
3. Herman P.R., Marjoribanks R.S., Oettl A., Chen K., Konovalov I., and Ness S. Appl. Surf. Sci. 154 (2000) 577
4. Lenzner M., Krausz F., Kruger J., and Kautek W. Appl. Surf. Sci. 154 (2000) 11
5. Varel H., Ashkenasi D., Rosenfeld A., Wahmer M., and Campbell E.E.B. Appl. Phys. A 65 (1997) 367
6. Wang J., Niino H., and Yabe A. Appl. Phys. A 68 (1999) 111
7. Böhme R., Braun A., and Zimmer K. Appl. Surf. Sci. 186 (2002) 276
8. Zhang J., Sugioka K., and Midorikawa K. Opt. Lett. 23 (1998) 1486
9. Zimmer K., Böhme R., and Rauschenbach B. Appl. Phys. A 79 (2004) 1883
10. Böhme R., and Zimmer K. Appl. Surf. Sci. 239 (2004) 109
11. Zimmer K., Böhme R., and Rauschenbach B. Microelectron. Eng. 78-79 (2005) 324
12. Kawaguchi Y., Ding X., Narazaki A., Sato T., and Niino H. Appl. Phys. A 80 (2005) 275
13. Atkins P. Physical Chemistry (1996), VCH, Weinheim p. 934
14. Ihlemann J., and Wolff-Rottke B. Appl. Surf. Sci. 106 (1996) 282
15. Li X., Jia T., Feng D., and Xu Z. Appl. Surf. Sci. 225 (2004) 339