Reading the footprints of strained islands

Microelectronics Journal

Volumn 37, Issue 12, 2006, Pages 1471-1476

  Rastelli, A ^a   Stoffel, M ^a   Katsaros, G ^a   Tersoff, J ^b   Denker, U ^a   Merdzhanova, T ^a   Kar, G S ^a   Costantini, G ^a   Kern, K ^a   von Kanel H ^c,d   Schmidt, O G ^a  

^a MAX PLANCK INSTITUT FÜR FESTKÖRPERFORSCHUNG   (Germany)

^b IBM T J WATSON RESEARCH CENTER   (United States)

^c ETH ZURICH   (Switzerland)

^d POLITECNICO DI MILANO   (Italy)

Author keywords

Ge Si; Morphological transitions; Selective etching; Self assembled quantum dots

Indexed keywords

SELF ASSEMBLY; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR QUANTUM DOTS; SURFACE PROPERTIES; THERMODYNAMICS;

GE/SI; MORPHOLOGICAL TRANSITIONS; SELECTIVE ETCHING; SELF ASSEMBLED QUANTUM DOTS;

ANNEALING;

EID: 33750721324     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2006.05.029     Document Type: Article

References (35)

1. Vailionis A., et al. Phys. Rev. Lett. 85 (2000) 3672
2. Tersoff J., Spencer B.J., Rastelli A., and von Känel H. Phys. Rev. Lett. 89 (2002) 196104
3. Rastelli A., von Känel H., Spencer B.J., and Tersoff J. Phys. Rev. B 68 (2003) 115301
4. Floro J.A., et al. Phys. Rev. Lett. 80 (1998) 4717
5. Medeiros-Ribeiro G., et al. Science 279 (1998) 353
6. Ross F.M., Tromp R.M., and Reuter M.C. Science 286 (1999) 1931
7. Sutter E., Sutter P., and Bernard J.E. Appl. Phys. Lett. 84 (2004) 2262
8. M. Stoffel, A. Rastelli, T. Merdzhanova, O.G. Schmidt, Microelectr. J., in press, 10.1016/j.mejo.2006.05.025.
9. Montalenti F., et al. Phys. Rev. Lett. 93 (2004) 216102
10. Rastelli A., Kummer M., and von Känel H. Phys. Rev. Lett. 87 (2001) 256101
11. Kamins T.I., Medeiros-Ribeiro G., Ohlberg D.A.A., and Williams R.S. J. Appl. Phys. 85 (1999) 1159
12. Kamins T.I., Medeiros-Ribeiro G., Ohlberg D.A.A., and Williams R.S. Appl. Phys. A 67 (1998) 727
13. Chaparro S.A., et al. Phys. Rev. Lett. 83 (1999) 1199
14. Denker U., Stoffel M., and Schmidt O.G. Phys. Rev. Lett. 90 (2003) 196102
15. Köhler U., et al. Ultramicroscopy 42-44 (1992) 832
16. Denker U., Schmidt O.G., Jin-Philipp N.Y., and Eberl K. Appl. Phys. Lett. 78 (2001) 3723
17. Sonnet P., and Kelires P.C. Appl. Phys. Lett. 85 (2004) 203
18. Rastelli A., and von Känel H. Surf. Sci. 532-535 (2003) 769
19. Voigtländer B. Surf. Sci. Reports 43 (2001) 127
20. Schmidt O.G., Lange C., and Eberl K. Appl. Phys. Lett. 75 (1999) 1905
21. Kamins T.I., Carr E.C., Williams R.S., and Rosner S.J. J. Appl. Phys. 81 (1997) 211
22. Carns T.K., Tanner M.O., and Wang K.L. J. Electrochem. Soc. 142 (1995) 1260
23. Katsaros G., Rastelli A., Stoffel M., Isella G., von Känel H., Bittner A.M., Tersoff J., Denker U., Schmidt O.G., Costantini G., and Kern K. Surf. Sci. 600 (2006) 2608
24. Rastelli A., et al. Phys. Rev. Lett. 95 (2005) 026103
25. Vostokov N., et al. Phys. Low-Dimensional Struct. 3/4 (2001) 295
26. Ross F.M., Tersoff J., and Tromp R.M. Phys. Rev. Lett. 80 (1998) 984
27. Tersoff J. Appl. Phys. Lett. 83 (2003) 353
28. Daruka I., Tersoff J., and Barabási A.L. Phys. Rev. Lett. 82 (1999) 2753
29. Henstrom W.L., et al. Appl. Phys. Lett. 77 (2000) 1623
30. Legoues F.K., et al. Phys. Rev. Lett. 73 (1994) 300
31. Denker U., et al. Phys. Rev. Lett. 94 (2005) 216203
32. Stoffel M., Rastelli A., Kiravittaya S., and Schmidt O.G. Phys. Rev. B 72 (2005) 205411
33. Rastelli A., and von Känel H. Surf. Sci. Lett. 515 (2002) L493
34. Merdzhanova T., Kiravittaya S., Rastelli A., Stoffel M., and Schmidt O.G. Phys. Rev. Lett. 96 (2006) 226103
35. De Seta M., Capellini G., Evangelisti F., and Spinella C. J. Appl. Phys. 92 (2002) 614