Probing the lateral composition profile of self-assembled islands

Physical Review Letters

Volumn 90, Issue 19, 2003, Pages

  Denker, U ^a   Stoffel, M ^a   Schmidt, O G ^a  

^a MAX PLANCK INSTITUT FÜR FESTKÖRPERFORSCHUNG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; HETEROJUNCTIONS; INTERDIFFUSION (SOLIDS); MATHEMATICAL MODELS; SELF ASSEMBLY; SEMICONDUCTING SILICON; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR GROWTH; SEMICONDUCTOR QUANTUM DOTS; STRAIN; SUBSTRATES; SURFACES;

LATERAL COMPOSITION PROFILE; SELECTIVE ETCHING; SELF-ASSEMBLED ISLANDS; SEMICONDUCTING SILICON GERMANIUM; STRAIN ENERGY;

SEMICONDUCTOR DEVICE STRUCTURES;

EID: 0037595553     PISSN: 00319007     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (22)

1. T.I. Kamins, E.C. Carr, R.S. Williams, and S.J. Rosner, J. Appl. Phys. 81, 211 (1997)
2. T.I. Kamins, G. Medeiros-Ribeiro, D.A.A. Ohlberg, and R.S. Wwilliams, Appl. Phys. A 67, 727 (1998).
3. X.Z. Liao, J.Zou, D.J.H. Cockayne, J. Qin, Z.M. Jiang, X. Wang, and R. Leon, Phys. Rev. B 60, 15 605 (1999).
4. G. Capellini, M. De Seta, and F. Evangelisti, Appl. Phys. Lett. 78, 303 (2001).
5. A.V. Kolobov, K. Morita, K.M. Itoh, and E.E. Haller, Appl. Phys. Lett. 81, 3855 (2002)
6. A. V. Kolobov, H. Oyanagi, K. Brunner, P. Schittenhelm, G. Abstreiter, and K. Tanaka, Appl. Phys. Lett. 78, 451 (2001).
7. J. Stangl, A. Daniel, V. Holy, T. Roch, G. Bauer, I. Kegel, T.H. Metzger, T. Wiebach, O.G. Schmidt, and K. Eberl, Appl. Phys. Lett. 79, 1474 (2001)
8. A. Hesse, J. Stangl, V. Holy, T. Roch, G. Bauer, O.G. Schmidt, U. Denker, and B. Struth, Phys. Rev. B 66, 085321 (2002).
9. S.A. Chaparro, J. Drucker, Y. Zhang, D. Chandrasekhar, M.R. McCartney, and D.J. Smith, Phys. Rev. Lett. 83, 1199 (1999)
10. Y. Zhang, M. Floyd, J. Drucker, and G.L. Kellogg, J. Appl. Phys. 90, 4748 (2001).
11. O.G. Schmidt, U. Denker, S. Christiansen, and F. Ernst, Appl. Phys. Lett. 81, 2614 (2002).
12. U. Denker, O.G. Schmidt, N.Y. Jin-Philipp, and K. Eberl, Appl. Phys. Lett. 78, 3723 (2001).
13. G. Medeiros-Ribeiro, T.I. Kamins, D.A.A. Ohlberg, and R.S. Williams, Phys. Rev. B 58, 3533 (1998).
14. D.J. Eaglesham and M. Cerullo, Phys. Rev. Lett. 64, 1943 (1990).
15. C. Manzano et al. (unpublished).
16. F.M. Ross, R.M. Tromp, and M.C. Reuter, Science 286, 1931 (1999).
17. B. Voigtländer and M. Kästner, Phys. Rev. B 60, R5121 (1999).
18. O.G. Schmidt, C. Lange, and K. Eberl, Appl. Phys. Lett. 75, 1905 (1999).
19. P. Raiteri, L. Miglio, F. Valentinotti, and M. Celino, Appl. Phys. Lett. 80, 3736 (2002).
20. N. Liu, J. Tersoff, O. Baklenov, A.L. Holmes, Jr., and C.K. Shih, Phys. Rev. Lett. 84, 334 (2000).
21. Numerical Data and Functional Relationships in Science and Technology, edited by M. Schulz and H. Weiss (Landolt-Börnstein, Springer, Berlin, 1987), Vol. III/17c.
22. D.E. Jesson, G. Chen, K.M. Chen, and S.J. Pennycook, Phys. Rev. Lett. 80, 5156 (1998).