Micromachined bolometers on polyimide

Sensors and Actuators, A: Physical

Volumn 132, Issue 2, 2006, Pages 452-459

  Mahmood, Aamer ^a   Butler, Donald P ^a   Çelik Butler, Zeynep ^a  

^a The University of Texas at Arlington   (United States)

Author keywords

Finite element analysis; Flexible sensors; Microbolometers; Micromachining; Thermal sensors; Wafer level packaging

Indexed keywords

DETECTORS; FINITE ELEMENT METHOD; MICROMACHINING; POLYIMIDES; SILICON COMPOUNDS; THERMAL CONDUCTIVITY; VACUUM APPLICATIONS; YTTRIUM BARIUM COPPER OXIDES;

FLEXIBLE SENSORS; MICROBOLOMETERS; THERMAL SENSORS; WAFER LEVEL PACKAGING;

BOLOMETERS;

EID: 33750716905     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.03.006     Document Type: Article

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