Monolithic arrays of micromachined pixels for infrared applications

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1998, Pages 459-462

  Cole, B E ^a   Higashi, R E ^a   Wood, R A ^a  

^a HONEYWELL TECHNOLOGY CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INFRARED DETECTORS; MICROMACHINING; SILICON WAFERS; THERMAL CONDUCTIVITY OF SOLIDS;

MICROMACHINED PIXELS;

MICROSENSORS;

EID: 0032276827     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)