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Thin Solid Films

Volumn 389, Issue 1-2, 2001, Pages 200-206

A study of the dielectric characteristics of aluminum oxide thin films deposited by spray pyrolysis from Al(acac)3

(5) Aguilar Frutis, M a Garcia, M a,b Falcony, C a,c Plesch, G d Jimenez Sandoval, S c

a INSTITUTO POLITÉCNICO NACIONAL (Mexico)

b UNIVERSIDAD NACIONAL AUTÓNOMA DE MÉXICO (Mexico)

c DEPARTAMENTO DE FÍSICA (Mexico)

d Physics and Informatics (Slovakia)

Author keywords

Aluminium oxide; Dielectric properties; Optical properties; Pyrolysis

Indexed keywords

ALUMINA; DEPOSITION; ELECTRIC CONDUCTIVITY; PYROLYSIS; SILICA; THIN FILMS;

SPRAY PYROLYSIS;

DIELECTRIC FILMS;

EID: 0035876764 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(01)00854-9 Document Type: Article

Times cited : (72)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.