Uncooled infrared microbolometers on a flexible substrate

IEEE Transactions on Electron Devices

Volumn 49, Issue 5, 2002, Pages 930-933

  Yaradanakul, Alp ^a   Butler, Donald P ^a   CÇelik Butler, Zeynep ^a  

^a Southern Methodist University   (United States)

Author keywords

Bolometers; Distributed sensors; Flexible structures; Infrared detectors; Infrared image sensors; Polyimide films; Robot sensing systems; Yttrium compounds

Indexed keywords

IMAGE SENSORS; INFRARED DETECTORS; POLYIMIDES; SEMICONDUCTOR DEVICE MANUFACTURE; SUBSTRATES; TEMPERATURE; THERMAL CONDUCTIVITY; YTTRIUM BARIUM COPPER OXIDES;

FLEXIBLE POLYIMIDE SUBSTRATE; INFRARED MICROBOLOMETERS; POLYIMIDE FILMS;

BOLOMETERS;

EID: 0036564279     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/16.998605     Document Type: Article

References (12)

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