Characterization of neutral species densities in dual frequency capacitively coupled photoresist ash plasmas by optical emission actinometry

Journal of Applied Physics

Volumn 100, Issue 8, 2006, Pages

  Worsley, M A ^a   Bent, S F ^a   Fuller, N C M ^b   Dalton, T ^b  

^a Stanford University   (United States)

^b IBM RESEARCH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC SPECIES; OPTICAL EMISSION SPECTROSCOPY; RADICAL DENSITY; REACTIVE NEUTRAL SPECIES;

COMPUTER SIMULATION; DENSITY (SPECIFIC GRAVITY); LIGHT EMISSION; NATURAL FREQUENCIES; PHOTORESISTORS;

PLASMAS;

EID: 33750515257     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2358303     Document Type: Article

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