Mode transition for power dissipation induced by driving frequency in capacitively coupled plasma

Journal of Applied Physics

Volumn 94, Issue 12, 2003, Pages 7422-7426

  You, S J ^a   Kim, H C ^a,b   Chung, C W ^a,c   Chang, H Y ^a   Lee, J K ^a,b  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Pohang University of Science and Technology (POSTECH)   (South Korea)

^c Hanyang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRIC DISCHARGES; ELECTRIC RESISTANCE; ELECTRODES; ELECTRONS; HEATING; MAGNETIC FIELD EFFECTS; PLASMA APPLICATIONS;

LINEAR FUNCTIONS; MODE TRANSITION;

ELECTRIC LOSSES;

EID: 0346935299     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1621085     Document Type: Article

References (16)

1. Y. Catherin, C. R. Acad. Sci. 273, 588 (1971).
2. B. Chapman, Glow Discharge Process (Wiley, New York, 1980), Chap. 5.
3. K. Takaki, D. Taguchi, and T. Fujiwara, Appl. Phys. Lett. 78, 2646 (2001).
4. S. V. Berezhnoi, I. K. Kaganovich, and L. D. Tsendin, Plasma Phys. Rep. 24, 556 (1998).
5. M. M. Turner, D. A. W. Hutchinson, R. A. Doyle, and M. B. Hopkins, Phys. Rev. Lett. 76, 2069 (1996).
6. V. A. Godyak, R. B. Piejak, and B. M. Alexandrovich, Plasma Sources Sci. Technol. 1, 36 (1992).
7. V. A. Godyak, R. B. Piejak, and B. M. Alexandrovich, Phys. Rev. Lett. 68, 40 (1992).
8. C. Beneking, J. Appl. Phys. 68, 4461 (1990).
9. V. A. Godyak, R. B. Piejak, and B. M. Alexandrovich, IEEE Trans. Plasma Sci. 19, 660 (1991).
10. S. J. You, C. W. Chung, K. H. Bai, and H. Y. Chang, Appl. Phys. Lett. 81, 2529 (2002).
11. V. A. Godyak, P. B. Piejak, and B. M. Alexandrovich, J. Appl. Phys. 69, 3455 (1991).
12. F. Schneider, Z. Angew. Phys. 6, 839 (1949).
13. V. A. Godyak and N. Sternberg, Phys. Rev. A 42, 2299 (1990).
14. L. S. Frost, Phys. Rev. 105, 354 (1957).
15. S. C. Brown, Basic Data of Plasma Physics (Wiley, New York, 1994), p. 65.
16. J. P. Verboncoeur, M. V. Alves, V. Vahedi, and C. K. Bildsall, J. Comput. Phys. 104, 321 (1993).