Diagnostics of processing plasmas, using optical emission from trace rare gases

IEEE International Conference on Plasma Science

Volumn , Issue , 2004, Pages 123-

  Donnelly, Vincent M ^a  

^a University of Houston   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON ENERGY DEPENDENCE; ELECTRON ENERGY DISTRIBUTION FUNCTIONS (EEDF); ION DENSITIES; TRACE RARE GASES OPTICAL EMISSION SPECTROSCOPY (TRG-OES);

ELECTRONS; EMISSION SPECTROSCOPY; INERT GASES; LIGHT EMISSION; PHOTONS; PLASMA DENSITY; TRACE ELEMENTS;

PLASMA DIAGNOSTICS;

EID: 13244298165     PISSN: 07309244     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)