Investigation of interactions between inert gases and nitrogen in direct current triode discharges

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 21, Issue 5, 2003, Pages 1683-1687

  Davison, A ^a   Avelar Batista, J C ^a   Wilson, A D ^a,b   Leyland, A ^a,c   Matthews, A ^a,c   Fancey, K S ^a  

^a UNIVERSITY OF HULL   (United Kingdom)

^b Sport Carrier Limited   (United Kingdom)

^c UNIVERSITY OF SHEFFIELD   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; MOLECULES; NITROGEN; PRESSURE EFFECTS; TRIODES;

NITROGEN SPECIES;

INERT GASES;

EID: 0142055996     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1597892     Document Type: Conference Paper

References (12)

1. J. W. Coburn and E. Kay, Appl. Phys. Lett. 18, 435 (1971).
2. K. S. Fancey and A. Matthews, Appl. Phys. Lett. 55, 834 (1989).
3. R. B. Heil and C. R. Aita, J. Vac. Sci. Technol. A 15, 93 (1997).
4. K. S. Fancey, A. Leyland, F. M. Badow, and A. Matthews, Mater. Sci. Technol. A262, 227 (1999).
5. J. C. Avelar-Batista, A. D. Wilson, A. Davison, A. Leyland, A. Matthews, and K. S. Fancey, Thin Solid Films 398, 507 (2001).
6. W. R. Bennett, Jr., W. L. Faust, R. A. McFarlane, and C. K. N. Patel, Phys. Rev. Lett. 8, 470 (1962).
7. C. R. Aita, J. Vac. Sci. Technol. A 16, 1303 (1998).
8. A. von Engel, Ionized Gases (American Institute of Physics, New York, 1993), pp. 52-54.
9. G. Francis, Ionization Phenomena in Cases (Butterworths, London, 1960), p. 30.
10. O. P. Bochkova and E. Y. A. Shreyder, Spectroscopic Analysis of Gas Mixtures (Academic, New York, 1965), p. 5.
11. M. Johnston, K. Fujii, J. Nickel, and S. Trajmar, J. Phys. B 29, 531 (1996).
12. A. D. Wilson, J. C. Avelar-Batista, S. J. Dowey, J. Robson, A. Leyland, A. Matthews, and K. S. Fancey, Surf. Coat. Technol. 142-144, 540 (2001).