Surface and volume loss of atomic nitrogen in a parallel plate rf discharge reactor

Plasma Sources Science and Technology

Volumn 9, Issue 3, 2000, Pages 248-255

  Adams, Steven F ^a   Miller, Terry A ^b  

^a AIR FORCE RESEARCH LABORATORY   (United States)

^b OHIO STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; BORON; ELECTRIC DISCHARGES; ELECTRODES; FLUORESCENCE; GROUND STATE; LASER BEAM EFFECTS; MULTIPHOTON PROCESSES; NITROGEN; PRESSURE EFFECTS; SILICON; STAINLESS STEEL;

DISCHARGE REACTORS;

PLASMA SOURCES;

EID: 0034245812     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/9/3/302     Document Type: Article

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