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Volumn , Issue , 2005, Pages 29-38

Engineering wafers for the nanotechnology era

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CURRENTS; LEAKAGE CURRENTS; MOSFET DEVICES; OPTIMIZATION; PRINTED CIRCUIT DESIGN; SEMICONDUCTOR DEVICES; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; SUBSTRATES;

EID: 33749165701     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ESSCIR.2005.1541554     Document Type: Conference Paper
Times cited : (6)

References (64)
  • 46
    • 33749189297 scopus 로고    scopus 로고
    • private communication
    • A. Boussagol, private communication.
    • Boussagol, A.1
  • 64
    • 0033905552 scopus 로고    scopus 로고
    • Solid State Materials for Advanced Technology
    • F. Fournel and al, Mat. Sci. & Eng. B, Solid State Materials for Advanced Technology, B73 (1-3), 42-46 (2000).
    • (2000) Mat. Sci. & Eng. B , vol.B73 , Issue.1-3 , pp. 42-46
    • Fournel, F.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.