A-BCD: An economic 100V RESURF silicon-on-insulator BCD technology for consumer and automotive applications

IEEE International Symposium on Power Semiconductor Devices and ICs (ISPSD)

Volumn , Issue , 2000, Pages 327-330

  Van Der Pol, J A ^a   Ludikhuize, A W ^a   Huizing, H G A ^a   Van Velzen, B ^a   Hueting, R J E ^a   Mom, J F ^a   Van Lijnschoten, G ^a   Hessels, G J J ^a   Hooghoudt, E F ^a   Van Huizen, R ^a   Swanenberg, M J ^a   Egbers, J H H A ^a   Van Den Elshout, F ^a   Koning, J J ^a   Schligtenhorst, H ^a   Soeteman, J ^a  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

BCD; DMOS; High voltage; RESURF; Silicon on insulator; Smart power

Indexed keywords

AUTOMOTIVE INDUSTRY; CMOS INTEGRATED CIRCUITS; CONSUMER ELECTRONICS; HIGH TEMPERATURE OPERATIONS; INTEGRATED CIRCUIT LAYOUT; MASKS; MOS DEVICES;

HIGHER FREQUENCY OPERATION; HIGHER PACKING DENSITY; LOWER MASK COUNT;

SILICON ON INSULATOR TECHNOLOGY;

EID: 0034447743     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. HV thin layer devices (RESURF devices)
2. A versatile 250/300V IC process
3. Process for the production of thin semiconductor material films
4. Smart power approaches VLSI complexity
5. Realization of high BV >700V in thin SOI devices