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Volumn 31, Issue 8, 2006, Pages 626-633

Silicon surface morphologies after femtosecond laser irradiation

Author keywords

Laser ablation; Morphology; Oxide; Si

Indexed keywords

INTERFACES (MATERIALS); LASER ABLATION; LASER BEAM EFFECTS; LASER PULSES; MICROMETERS; MORPHOLOGY; OXIDES; SILICON; SINGLE CRYSTALS;

EID: 33748320778     PISSN: 08837694     EISSN: None     Source Type: Journal    
DOI: 10.1557/mrs2006.160     Document Type: Article
Times cited : (188)

References (89)
  • 70
    • 30644467289 scopus 로고    scopus 로고
    • Thin films-stresses and mechanical properties XI
    • edited by T.E. Buchheit, A.M. Minor, R. Spolenak, and K. Takashima, Warrendale, PA
    • J.P. McDonald, V.R. Mistry, K.E. Ray, and S.M. Yalisove, in "Thin Films-Stresses and Mechanical Properties XI," edited by T.E. Buchheit, A.M. Minor, R. Spolenak, and K. Takashima (Mater. Res. Soc. Symp. Proc. 875, Warrendale, PA, 2005) p. 359.
    • (2005) Mater. Res. Soc. Symp. Proc. , vol.875 , pp. 359
    • McDonald, J.P.1    Mistry, V.R.2    Ray, K.E.3    Yalisove, S.M.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.