Femtosecond laser-induced damage morphologies of crystalline silicon by sub-threshold pulses

Optics and Lasers in Engineering

Volumn 43, Issue 9, 2005, Pages 977-986

  Tran, D V ^a   Zheng, H Y ^b   Lam, Y C ^a,c   Murukeshan, V M ^c   Chai, J C ^c   Hardt, D E ^c,d  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

^c NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^d USA   (United States)

Author keywords

Femtosecond laser; Silicon; Sub threshold pulses; Surface damage morphologies

Indexed keywords

CONTINUOUS WAVE LASERS; CRYSTALLINE MATERIALS; DEFECTS; DOPING (ADDITIVES); HEAT AFFECTED ZONE; LASER ABLATION; PULSED LASER APPLICATIONS; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; TRANSMISSION ELECTRON MICROSCOPY;

FEMTOSECOND LASERS; LASER-INDUCED PERIODIC SURFACE STRUCTURE (LIPSS); SUB-THRESHOLD PULSES; SURFACE DAMAGE MORPHOLOGIES;

LASER PULSES;

EID: 20344399931     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optlaseng.2004.10.006     Document Type: Article

References (27)

1. D. Bäuerle Laser processing and chemistry 3rd ed 2000 Springer New York
2. M.V. Allmen, and A. Blatter Laser-beam interactions with materials 2nd ed 1995 Springer New York
3. R.F. Wood C.W. White R.T. Young Semiconductors and semimetals vol. 23 1984 Academic Orlando
4. P.L. Liu, R. Yen, and N. Bloembergen Picosecond laser-induced melting and resolidification morphology on Si Appl Phys Lett 34 12 1979 864 866
5. J.M. Liu, R. Yen, H. Kurz, and N. Bloembergen Phase transformation on and charged particle emission from a silicon crystal surface, induced by picosecond laser pulses Appl Phys Lett 39 9 1981 755 757
6. C.V. Shank, R. Yen, and C. Hirlimann Time-resolved reflectivity measurements of femtosecond-optical-pulse-induced phase transitions in silicon Phys Rev Lett 50 6 1983 454 456
7. J. Bonse, S. Baudach, J. Kruger, W. Kautek, and M. Lenzner Femtosecond laser ablation of silicon-modification thresholds and morphology Appl Phys A 74 1 2002 19 25
8. D. Strickland, and G. Mourou Compression of amplified chirped optical pulses Opt Commun 56 3 1985 219 221
9. X. Liu, D. Du, and G. Mourou Laser ablation and micromachining with ultrashort laser pulses IEEE J Quantum Electron 33 10 1997 1706 1716
10. B.N. Chichkov, C. Momma, S. Nolte, F.V. Alvensleben, and A. Tuennermann Femtosecond, picosecond, and nanosecond laser ablation of solids Appl Phys A 63 2 1996 109 115
11. W. Kautek, and J. Kruger Femtosecond laser ablation of metallic, semiconducting, ceramic and biological materials SPIE 2207 1994 600 611
12. S. Preuss, A. Demchuk, and M. Stuke Subpicosecond UV laser ablation of metals Appl Phys A 61 1 1995 33 37
13. A. Cavalleri, K. Sokolowski-Tinten, J. Bialkoski, M. Schreiner, and D. von der Linde Femtosecond melting and ablation of semiconductors studied with time-of-flight mass spectroscopy J Appl Phys 85 6 1999 3301 3309
14. K. Sokolowski-Tinten, J. Bialkowski, A. Cavalleri, D. von der Linde, A. Orapin, J. Mayer-ter-Vehn, and S.I. Anisimov Transient states of matter during short pulse laser ablation Phys Rev Lett 81 1998 224 227
15. R.F.W. Herrmann, J. Gerlach, and E.E.B. Campbell Ultrashort pulse laser ablation of silicon an MD simulation study Appl Phys A 66 1 1998 35 42
16. P. Stampfli, and K.H. Bennemann Theory for laser-induced femtosecond phase transition of silicon and GaAs Appl Phys A 60 2 1996 191 196
17. J. Bonse, K.W. Brzezinka, and A.J. Meixner Modifying single-crystalline silicon by femtosecond laser pulses an analysis by micro Raman spectroscopy, scanning laser microscopy and atomic force microscopy Appl Surf Sci 221 1-4 2004 215 230
18. A. Borowiec, M. Mackenzie, G.C. Weatherly, and H.K. Haugen Transmission and scanning electron microscopy studies of single femtosecond-laser-pulse ablation of silicon Appl Phys A 76 2 2003 201 207
19. Y.K. Jhee, M.F. Becker, and R.M. Walser Charge emission and precursor accumulation in the multiple-pulse damage regime of silicon J Opt Soc Am B 2 10 1985 1626 1633
20. P.M. Fauchet Gradual surface transitions on semiconductors induced by multiple picosecond laser pulses Phys Lett A 93A 3 1983 155 157
21. A.L. Smirl, I.W. Boyd, Boggess, Moss, and H.M. van Driel Structural changes produced in silicon by intense 1-μm ps pulses J Appl Phys 60 3 1986 1169 1182
22. D.K. Cohen, B. Little, and F.S. Luecke Techniques for measuring 1-μm diam Gaussian beams Appl Opts 23 4 1984 637 640
23. J. Bonse, J.M. Wrobel, J. Krüger, and W. Kautek Ultrashort-pulse laser ablation of indium phosphide in air Appl Phys A 72 1 2001 79 84
24. 2 with pulse widths from 7 ns to 150 fs Appl Phys Lett 64 23 1994 3071 3073
25. H.M. van Driel, J.E. Sipe, and J.F. Young Laser-induced periodic surface structure on solids a universal phenomenon Phys Rev Lett 49 26 1982 1955 1958
26. J. Bonse, J.M. Wrobel, K.W. Brzezinka, N. Esser, and W. Kautek Femtosecond laser irradiation of indium phosphide in air raman spectroscopic and atomic force microscopic investigations Appl Surf Sci 202 3-4 2002 272 282
27. T.H. Her, R.J. Finlay, C. Wu, and S. Deliwala Microstructuring of silicon with femtosecond laser pulses Appl Phys Lett 73 12 1998 1673 1675