Laser ablation of silicon in water with nanosecond and femtosecond pulses

Optics Letters

Volumn 30, Issue 13, 2005, Pages 1740-1742

  Ren, Jun ^a   Kelly, Michael ^a   Hesselink, Lambertus ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABLATION RATE; FEMTOSECOND PULSES; LASER ENERGY; NANOSECOND PULSES;

APPROXIMATION THEORY; LASER ABLATION; LASER BEAM EFFECTS; LASER PULSES; SCANNING ELECTRON MICROSCOPY; ULTRASHORT PULSES; WATER; X RAY PHOTOELECTRON SPECTROSCOPY;

SILICON;

EID: 22144465493     PISSN: 01469592     EISSN: 15394794     Source Type: Journal    
DOI: 10.1364/OL.30.001740     Document Type: Article

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