Dynamics of the hydrodynamical growth of columns on silicon exposed to ArF excimer-laser irradiation

Applied Physics A: Materials Science and Processing

Volumn 66, Issue 1, 1998, Pages 83-86

  Sanchez F ^a   Morenza, J L ^a   Aguiar, R ^a   Delgado, J C ^a   Varela, M ^a  

^a UNIVERSITY OF BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CRYSTAL GROWTH; EXCIMER LASERS; LASER BEAM EFFECTS; PULSED LASER APPLICATIONS; SILICON; SINGLE CRYSTALS; SURFACE STRUCTURE;

DISCRETE HILLOCKS; PROTUBERANCES;

CRYSTAL WHISKERS;

EID: 0031700032     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s003390050641     Document Type: Article

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