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Applied Physics A: Materials Science and Processing

Volumn 80, Issue 8, 2005, Pages 1717-1724

Femtosecond laser micromachining of grooves in silicon with 800 nm pulses

(3) Crawford, T H R a Borowiec, A a Haugen, H K a,b

a MCMASTER UNIVERSITY (Canada)

b MCMASTER UNIVERSITY (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; LASER PULSES; MICROMACHINING; MORPHOLOGY; PARAMETER ESTIMATION; POLARIZATION; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR MATERIALS;

GROOVES; LASER MICROMACHINING; LASER POLARIZATION; PULSE ENERGY;

SILICON;

EID: 17544363244 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/s00339-004-2941-2 Document Type: Article

Times cited : (124)

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