Femtosecond laser interaction with silicon under water confinement

Thin Solid Films

Volumn 467, Issue 1-2, 2004, Pages 334-341

  Daminelli, G ^a   Kruger J ^a   Kautek, W ^a  

^a BAM FEDERAL INSTITUTE FOR MATERIALS RESEARCH AND TESTING   (Germany)

Author keywords

Laser ablation; Silicon; Solid electrolyte interface; Water

Indexed keywords

CAVITATION BUBBLES; FEMTOSECOND LASER INTERACTION; WATER CONFINEMENT; WATER CONTACTS;

BUBBLE FORMATION; CHEMICAL MODIFICATION; DEBRIS; DEPOSITION; LASER ABLATION; LASER PULSES; NONLINEAR SYSTEMS; RADIATION SHIELDING; SILICON; SOLID ELECTROLYTES;

LASER BEAM EFFECTS;

EID: 4444331228     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.04.043     Document Type: Article

References (23)

1. Kruusing A. Opt. Lasers Eng. 41:2004;307.
2. Kruusing A. Opt. Lasers Eng. 41:2004;329.
3. Cortona A., Kautek W. Phys. Chem., Chem. Phys. 3:2001;5283.
4. Kautek W., Daminelli G. Electrochim. Acta. 48:2003;3249.
5. Bonse J., Baudach S., Krüger J., Kautek W., Lenzner M. Appl. Phys., A. 74:2002;19.
6. Hammer D.X., Thomas R.J., Noojin G.D., Rockwell B.A., Kennedy P.K., Roach W.P. IEEE J. Quantum Electron. 32:1996;670.
7. Noack J., Vogel A. IEEE J. Quantum Electron. 35:1999;1156.
8. Kabashin A.V., Meunier M., Kingston C., Luong J.H.T. J. Phys. Chem., B. 107:2003;4527.
9. Tsuji T., Kakita T., Tsuji M. Appl. Surf. Sci. 206:2003;314.
10. Zhu S., Lu Y.F., Hong M.H., Chen X.Y. J. Appl. Phys. 89:2001;2400.
11. Siano S., Pini R., Salimbeni R., Vannini M. Appl. Phys., B. 62:1996;503.
12. Vogel A., Busch S., Parlitz U. J. Acoust. Soc. Am. 100:1996;148.
13. Noack J., Hammer D.X., Noojin G.D., Rockwell B.A., Vogel A. J. Appl. Phys. 83:1998;7488.
14. Pedraza A.J., Fowlkes J.D., Guan Y.-F. Appl. Phys., A. 77:2003;277.
15. Liu W., Kosareva O., Golubtsov I.S., Iwasaki A., Becker A., Kandidov V.P., Chin S.L. Appl. Phys., B. 76:2003;215.
16. Vogel A., Noack J., Nahen K., Theisen D., Busch S., Parlitz U., Hammer D.X., Noojin G.D., Rockwell B.A., Birngruger R. Appl. Phys., B. 68:1999;271.
17. Brodeur A., Ilkov F.A., Chin S.L. Opt. Commun. 129:1996;193.
18. Rae S.C. Opt. Commun. 104:1994;330.
19. Le Blanc S.P., Sauerbrey R. J. Opt. Soc. Am., B. 13:1996;72.
20. Liu J.M. Opt. Lett. 7:1982;196.
21. Preuss S., Demchuk A., Stuke M. Appl. Phys., A. 61:1995;33.
22. Reif J., Costache F., Henyk M., Pandelov S.V. Appl. Surf. Sci. 197/198:2002;891.
23. Rudolph P., Kautek W. Thin Solid Films. 453-454:2004;537.