Investigation of MEMS resonator characteristics during long-term and wide temperature variation operation

American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS

Volumn , Issue , 2004, Pages 413-416

  Kim, Bongsang ^a   Candler, Rob N ^a   Hopcroft, Matthew ^a   Agarwal, Manu ^a   Park, Woo Tae ^a   Li, Jeffrey T ^a   Kenny, Thomas ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASYMPTOTIC STABILITY; ENCAPSULATION; NATURAL FREQUENCIES; RESONATORS; SILICON; TEMPERATURE DISTRIBUTION; THERMAL CYCLING;

ENVIRONMENTAL TEMPERATURE; MEMS RESONATOR; SILICOPN RESONATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 21644458665     PISSN: 1096665X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2004-61727     Document Type: Conference Paper

References (10)

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