An electro-thermal bimorph-based microactuator for precise track-positioning of optical disk drives

Journal of Micromechanics and Microengineering

Volumn 15, Issue 5, 2005, Pages 958-965

  Yang, J P ^a   Deng, X C ^a,b   Chong, T C ^a,b  

^a DATA STORAGE INSTITUTE   (Singapore)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRO-THERMAL ACTUATIONS; FINITE-ELEMENT SIMULATIONS; OPTICAL DISK DRIVES (ODD); TRACK DIRECTION;

CANTILEVER BEAMS; COMPUTER SIMULATION; ELECTRIC CURRENTS; ELECTRIC POTENTIAL; FINITE ELEMENT METHOD; INTEGRATED CIRCUITS; MIRRORS; OPTICAL SYSTEMS; THERMAL EXPANSION; THERMOMECHANICAL TREATMENT; TRACKING (POSITION); VIBRATIONS (MECHANICAL);

MICROACTUATORS;

EID: 24144482735     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/5/009     Document Type: Article

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