Localized and CMOS compatible growth of carbon nanotubes on A 3 × 3 μm2 microheater spot

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 1, Issue , 2005, Pages 93-96

  Jungen, Alain ^a   Stampfer, Christoph ^a   Tonteling, Marc ^a   Schiesser, Sebastien ^a   Sarangi, Debajyoti ^a   Hierold, Christofer ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

Carbon nanotubes; Localized growth; Nanosystems; Process integration

Indexed keywords

FURNACE HEATING; LOCALIZED GROWTH; NANOSYSTEMS; PROCESS INTEGRATION;

CHEMICAL VAPOR DEPOSITION; CMOS INTEGRATED CIRCUITS; ELECTROMECHANICAL DEVICES; GROWTH (MATERIALS); MICROMACHINING; POLYSILICON;

CARBON NANOTUBES;

EID: 27544514481     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2005.1597644     Document Type: Conference Paper

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