Simple approach to characterizing the driving force of polysilicon laterally driven thermal microactuators

Sensors and Actuators, A: Physical

Volumn 80, Issue 3, 2000, Pages 267-272

  Huang, Qing An ^a   Lee, Neville Ka Shek ^a  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

DEFLECTION (STRUCTURES); STRUCTURAL ANALYSIS;

POLYSILICON THERMAL ACTUATORS;

MICROACTUATORS;

EID: 0033875285     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00252-6     Document Type: Article

References (12)

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