An experimental study of the contact mode AFM scanning capability of polyimide cantilever probes

Ultramicroscopy

Volumn 106, Issue 8-9, 2006, Pages 874-880

  Gaitas, Angelo ^a   Gianchandani, Yogesh B ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Atomic force microscopy; Failure analysis; Frictional force measurements; High speed imaging; High throughput; Lateral force measurements; Scanning probe microscopy; Scanning thermal microscopy

Indexed keywords

ATOMIC FORCE MICROSCOPY; FAILURE ANALYSIS; IMAGING TECHNIQUES; LITHOGRAPHY; POLYIMIDES; RESONANCE;

FRICTIONAL FORCE MEASUREMENTS; HIGH SPEED IMAGING; HIGH THROUGHPUT; LATERAL FORCE MEASUREMENTS; SCANNING PROBE MICROSCOPY; SCANNING THERMAL MICROSCOPY;

CANTILEVER BEAMS;

POLYIMIDE;

ARTICLE; ATOMIC FORCE MICROSCOPY; FORCE; FRICTION; IMAGING; MATHEMATICAL ANALYSIS; MEASUREMENT; MECHANICAL PROBE; THEORETICAL STUDY;

EID: 33745629604     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultramic.2005.12.021     Document Type: Article

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