Ultracompliant thermal probe array for scanning non-planar surfaces without force feedback

Journal of Micromechanics and Microengineering

Volumn 15, Issue 1, 2005, Pages 237-243

  McNamara, Shamus ^a   Basu, Amar S ^a   Lee, Joohyung ^a   Gianchandani, Yogesh B ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; MICROSCOPIC EXAMINATION; POLYIMIDES; SANDWICH STRUCTURES; SCANNING; STRUCTURAL DESIGN; SURFACE TOPOGRAPHY; THERMAL EFFECTS;

INTEGRATED ACTUATORS; SCANNING THERMAL MICROSCOPY (STHM); SPATIAL RESOLUTION; THERMAL PROBES; TOPOGRAPHICAL VARIATIONS;

MICROMACHINING;

EID: 12344257700     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/1/033     Document Type: Article

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