Atomic force microscopy using a piezoresistive cantilever

Transducers '91

Volumn , Issue , 1991, Pages 448-451

  Tortonese, M ^a   Yamada, H ^a   Barrett, R C ^a   Quate, C F ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

METAL CUTTING - MICROMACHINING; PIEZOELECTRIC TRANSDUCERS; SEMICONDUCTOR DEVICE MANUFACTURE - SILICON ON INSULATOR TECHNOLOGY; SENSORS - SILICON SENSORS; SURFACES - ROUGHNESS MEASUREMENT;

ATOMIC FORCE MICROSCOPY; CANTILEVER DEFLECTION; MINIMUM DETECTABLE DEFLECTIONS; NOISE SPECTRUM; PIEZORESISTIVE CANTILEVER;

MICROSCOPES;

EID: 0026372168     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)