PZT cantilever array integrated with piezoresistor sensor for high speed parallel operation of AFM

Sensors and Actuators, A: Physical

Volumn 103, Issue 1-2, 2003, Pages 122-129

  Kim, Young Sik ^a   Nam, Hyo Jin ^a   Cho, Seong Moon ^a   Hong, Jae Wan ^b   Kim, Dong Chun ^a   Bu, Jong U ^a  

^a LG Electronics Inc   (South Korea)

^b Seoul National University   (South Korea)

Author keywords

Atomic force microscopy; Electrical coupling; High speed; Piezoresistor; PZT actuator; PZT cantilever

Indexed keywords

ACTUATORS; ATOMIC FORCE MICROSCOPY; CAPACITANCE; COMPUTER SIMULATION; EQUIVALENT CIRCUITS; LEAKAGE CURRENTS;

PIEZORESISTOR SENSORS;

SENSORS;

EID: 0037438880     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00311-4     Document Type: Conference Paper

References (7)

1. H.-J. Nam, S.-M. Cho, Y. Yee, H.-M. Lee, D.-C. Kim, J.-U. Bu, J. Hong, Fabrication and characterization of piezoelectric PZT cantilever for high speed atomic force microscopy, Integr. Ferroelectr. 35 (2001) 185.
2. K. Wilder, C.F. Quate, B. Singh, D.F. Kyser, Electron beam and scanning probe lithography: a comparison, J. Vac. Sci. Technol. B 16 (1998) 3864 3873.
3. S.C. Minne, S.R. Manalis, C.F. Quate, Parallel atomic force microscopy using cantilevers with integrated piezoresistive sensors and integrated piezoelectric actuators, Appl. Phys. Lett. 67 (1995) 3918 3920.
4. S.R. Manalis, S.C. Minne, C.F. Quate, Atomic force microscopy for high speed imaging using cantilever with integrated actuator and sensor, Appl. Phys. Lett. 68 (1996) 871-873.
5. S.C. Minne, G. Yaralioglu, S.R. Manalis, J.D. Adams, J. Zesch, A. Atalar, C.F. Quate, Automated parallel high speed atomic force microscopy, Appl. Phys. Lett. 72 (1998) 2340-2342.
6. D.-C. Kim, H.-J. Nam, W. Jo, H.-M. Lee, S.-M. Cho, J.-U. Bu, H.-B. Kang, Integration of a split word line ferroelectric memory using a novel etching technology, Integr. Ferroelectr. 27 (1999) 279.
7. 2 electrodes, Thin Solid Films 256 (1995) 73-79.