High-speed scanning by dual feedback control in SNOM/AFM

Journal of Microscopy

Volumn 194, Issue 2-3, 1999, Pages 325-328

  Egawa, Akira ^a   Chiba, N ^a   Homma, K ^a   Chinone, K ^a   Muramatsu, H ^a  

^a SEIKO INSTRUMENTS INC   (Japan)

Author keywords

Atomic force microscope; Dual feedback control; High speed scanning; Near field optical microscope

Indexed keywords

ATOMIC FORCE MICROSCOPY; FEEDBACK CONTROL; PIEZOELECTRIC ACTUATORS;

'CURRENT; ATOMIC FORCE; ATOMIC FORCE MICROSCOPE; ATOMIC FORCE MICROSCOPE SYSTEM; DUAL FEEDBACK; DUAL FEEDBACK CONTROL; FEEDBACK CONTROLLER; HIGH SPEED SCANNING; NEAR FIELD OPTICAL MICROSCOPE; SCANNING NEAR-FIELD OPTICAL MICROSCOPE;

MICROSCOPES;

CHROMIUM; SILICON DIOXIDE;

ATOMIC FORCE MICROSCOPY; CONFERENCE PAPER; FEEDBACK SYSTEM; HEIGHT; IMAGE QUALITY; OPTICS; PIEZOELECTRICITY; PRIORITY JOURNAL; SCANNING NEAR FIELD OPTICAL MICROSCOPY;

EID: 0032989550     PISSN: 00222720     EISSN: None     Source Type: Journal    
DOI: 10.1046/j.1365-2818.1999.00516.x     Document Type: Conference Paper

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