New dynamic scanning force microscopes using piezoelectric PZT microcantilevers

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 459-462

  Itoh, Toshihiro ^a   Chu, Jiaru ^a   Misumi, Ichiko ^a   Kataoka, Kenichi ^a   Suga, Tadatomo ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MICROSCOPES; PIEZOELECTRIC DEVICES; SOL-GELS; THIN FILMS;

PIEZOELECTRIC CANTILEVERS; SCANNING FORCE MICROSCOPES (SFM);

MICROELECTROMECHANICAL DEVICES;

EID: 0030650544     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)