Low-temperature polycrystalline silicon thin-film transistors and circuits on flexible substrates

MRS Bulletin

Volumn 31, Issue 6, 2006, Pages 461-465

  Van Der Wilt, P C ^a   Kane, M G ^a   Limanov, A B ^a   Firester, A H ^a   Goodman, L ^a   Lee, J ^a   Abelson, J R ^a   Chitu, A M ^a   Im, James S ^a  

^a NONE

Author keywords

Crystalline; Microelectronics; Polycrystal; Si

Indexed keywords

CRYSTALLINE MATERIALS; CRYSTALLIZATION; LOW TEMPERATURE EFFECTS; PLASTIC FILMS; POLYCRYSTALS; SILICON; SOLIDIFICATION; THIN FILM TRANSISTORS;

FLEXIBLE SUBSTRATES; HIGH DEFECT DENSITIES; PULSED-LASER-CRYSTALLIZATION; SEQUENTIAL LATERAL SOLIDIFICATION (SLS);

MICROELECTRONICS;

EID: 33745621681     PISSN: 08837694     EISSN: None     Source Type: Journal    
DOI: 10.1557/mrs2006.119     Document Type: Review

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