High-mobility poly-Si TFT's fabricated on flexible stainless-steel substrates

IEEE Electron Device Letters

Volumn 20, Issue 11, 1999, Pages 574-576

  Serikawa, Tadashi ^a   Omata, Fujio ^b  

^a Electronics Corporation   (Japan)

^b NTT CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FLAT PANEL DISPLAYS; INTEGRATED CIRCUIT MANUFACTURE; POLYCRYSTALLINE MATERIALS; SPUTTERING; STAINLESS STEEL;

FLEXIBLE SUBSTRATES;

THIN FILM TRANSISTORS;

EID: 0033221991     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/55.798048     Document Type: Article

References (10)

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