Poly-Si thin-film transistors on steel substrates

IEEE Electron Device Letters

Volumn 21, Issue 2, 2000, Pages 70-72

  Howell, Robert S ^a   Stewart, Mark ^a   Karnik, Sooraj V ^a   Saha, Sambit K ^a   Hatalis, Miltiadis K ^a  

^a LEHIGH UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; INTEGRATED CIRCUIT MANUFACTURE; MICROELECTRONICS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; STAINLESS STEEL; SUBSTRATES; SURFACE ROUGHNESS; THRESHOLD VOLTAGE;

FLEXIBLE SUBSTRATE; POLYSILICON; ROLL TO ROLL PROCESSING; STEEL FOIL SUBSTRATE;

THIN FILM TRANSISTORS;

EID: 0034140186     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/55.821670     Document Type: Article

References (9)

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