Excimer laser crystallization and doping of silicon films on plastic substrates

Applied Physics Letters

Volumn 70, Issue 3, 1997, Pages 342-344

  Smith, P M ^a   Carey, P G ^a   Sigmon, T W ^a  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 8744262971     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.118409     Document Type: Article

References (12)

1. T. Sameshima, A. Kohno, M. Sekiya, M. Hara, and N. Sano, Jpn. J. Appl. Phys. 1 33, 834 (1994).
2. C. S. McCormick, C. E. Weber, and J. R. Abelson, Mater. Res. Soc. Symp. Proc. H 424, (1996) (in press).
3. See, for example, Proceedings of the 1994 International Display Research Conference (Society for Information Display, Santa Ana, CA, 1994).
4. T. F. Deutsch, J. C. C. Fan, G. W. Turner, R. L. Chapman, D. J. Ehrlich, and R. M. Osgood, Jr., Appl. Phys. Lett. 38, 144 (1981).
5. P. G. Carey and T. W. Sigmon, Appl. Surf. Sci. 43, 325 (1989).
6. E. Fogarassy, H. Pattyn, M. Elliq, A. Slaoui, B. Prevot, R. Stuck, S. De Unamuno, and E. L. Mathé, Appl. Surf. Sci. 69, 231 (1993).
7. M. O. Thompson, Ph.D. thesis, Cornell University, 1984.
8. M. J. Aziz, C. W. White, J. Narayan, and B. Stritzker, in Energy Beam-Solid Interactions and Transient Thermal Processing, edited by V. T. Nguygen and A. G. Cullis (Les Éditions de Physique, 1985), p. 231.
9. Ping Mei, J. B. Boyce, M. Hack, R. Lujan, R. I. Johnson, G. B. Anderson, D. K. Fork, S. E. Ready, and D. L. Smith, Mater. Res. Soc. Symp. Proc. 297, 151 (1993).
10. P. G. Carey, P. M. Smith, and T. W. Sigmon (unpublished).
11. C. Summonte, M. Bianconi, and D. Govoni, Mater. Res. Soc. Symp. Proc. 297, 539 (1993).
12. L. Wei, M. Vaudin, C. S. Hwang, and G. White, in J. Mater. Res. (to be published).