Low-temperature polysilicon thin-film transistors fabricated from laser-processed sputtered-silicon films

IEEE Electron Device Letters

Volumn 19, Issue 9, 1998, Pages 343-344

  Giust, Gary K ^a,b,c   Sigmon, Thomas W ^a,b,d   Carey, Paul G ^a,d   Weiss, B ^e   Davis, Gary A ^a,e  

^a IEEE   (United States)

^b Arizona State University   (United States)

^c AGERE SYSTEMS   (United States)

^d LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

^e Intevac Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LASER APPLICATIONS; LOW TEMPERATURE EFFECTS; SEMICONDUCTING FILMS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE;

LASER PROCESSING;

THIN FILM TRANSISTORS;

EID: 0032162936     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/55.709637     Document Type: Article

References (12)

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