High performance polysilicon circuits on thin metal foils

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5004, Issue , 2003, Pages 122-126

  Afentakis, Themis ^a   Hatalis, Miltiadis ^a   Voutsas, Tolis ^b   Hartzell, John ^b  

^a LEHIGH UNIVERSITY   (United States)

^b SHARP LABORATORIES OF AMERICA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLIZATION; INTEGRATED CIRCUITS; MICROELECTRONICS; POLYMERS; POLYSILICON; STAINLESS STEEL; THIN FILM TRANSISTORS;

ROLL-TO-ROLL PROCESSING;

METAL FOIL;

EID: 0041358856     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.482574     Document Type: Conference Paper

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6. T. Afentakis, M. Hatalis, SPIE Proceedings, Vol. 4295, pp. 108-112, (2001)