Experiment design and UV-LIGA microfabrication technology to study the fracture toughness of Ni microstructures

Microsystem Technologies

Volumn 12, Issue 4, 2006, Pages 306-314

  Dai, Wen ^a   Oropeza, Catherine ^a   Lian, Kun ^b   Wang, Wanjun ^a  

^a Louisiana State University   (United States)

^b LOUISIANA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FRACTURE TOUGHNESS; INDUSTRIAL APPLICATIONS; NICKEL; ULTRAVIOLET RADIATION;

FABRICATION TECHNOLOGY; MICROFABRICATED STRUCTURES;

MICROSTRUCTURE;

EID: 33644519346     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-005-0056-0     Document Type: Article

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