Mechanical testing of thicker MEMS materials

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 62, Issue , 1997, Pages 93-97

  Sharpe Jr , William N ^a   LaVan, David A ^a   McAleavey, Andrew ^a  

^a Johns Hopkins University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODEPOSITION; LITHOGRAPHY; MECHANICAL TESTING; NICKEL; YIELD STRESS;

MICROELECTROMECHANICAL SYSTEM (MEMS) MATERIALS;

MICROELECTROMECHANICAL DEVICES;

EID: 0031362512     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (14)

1. Sharpe, W. N., Jr., Yuan, B., Vaidyanathan, R., and Edwards, R. L., 1996, "New Test Structures and Techniques for Measurement of Mechanical Properties of MEMS Materials", Proceedings of the SPIE Symposium on Microlithography and Metrology in Micromachining II, Austin, TX, pp. 78-91.
2. The Use of Small-Scale Specimens for Testing Irradiated Materials, 1983, ASTM STP 888.
3. Small Specimen Test Techniques Applied to Nuclear Reactor Vessel Thermal Annealing and Plant Life Extension, 1993, ASTM STP 1204.
4. Small Specimen Test Techniques, 1997, ASTM STP 1329.
5. Sharpe, W. N., Jr. and Markey, B. A., 1994, "Microsample Testing of Weldments", Advances in Engineering Measurements, The British Society of Strain Measurement, Edinburgh, pp. 64-68.
6. Legros, M., Hemker, K. J., LaVan, D. J., Sharpe, W. N., Jr., Rittner, M. N., and Weertman, J. R., 1996, "Micro-Tensile Testing of Nanocrystalline Al/Zr Alloys", accepted for publication in Nanophase and Nanocomposite Materials II, Materials Reserach Society Symposium, Boston.
7. Sharpe, W. N., Jr. and Mckeown, D. E., "A Miniature Test Machine", 1993, Proceedings of the 1993 SEM "50th Anniversary" Spring Conference on Experimental Mechanics, pp. 547-555.
8. Yuan, B. and Sharpe, W. N., Jr., 1997, "Fatigue Testing of Microspecimens from a Weldment", Journal of Testing and Evaluation, accepted for publication.
9. Sharpe, W. N., Jr., 1989, "An Interferometric Strain/Displacement Measurement System", NASA Technical Memorandum 101638.
10. Sharpe, W. N., Jr., Danley, D., and LaVan, D. A., 1997, "Microspecimen Tensile Tests of A533-B Steel," submitted for publication in Small Specimen Test Techniques, ASTM STP 1329, W. R. Corwin, S. T. Rosinski, and E. Van Walle, Eds., American Society for Testing and Materials.
11. Rosinski, S. T., 1997, oral presentation at Third Symposium on Small Specimen Test Techniques, sponsored by ASTM Committee E-10, New Orleans.
12. "General Requirements for Steel Plates for Pressure Vessels", 1994, ASTM A20.
13. Mazza, E., Abel, S., and Dual, J., 1996, "Experimental Determination of Mechanical Properties of Ni and Ni-Fe Microbars", accepted for publication in Micro System Technologies, Springer International.
14. Metals Handbook, 1990, Tenth Edition, Volume 2, ASM International.