Fracture initiation at sharp notches in single crystal silicon

Journal of Applied Physics

Volumn 83, Issue 7, 1998, Pages 3574-3582

  Suwito, Wan ^a   Dunn, Martin L ^a   Cunningham, Shawn J ^b  

^a UCB 450   (United States)

^b Ford Microelectronics Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000074418     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.366574     Document Type: Article

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