Multilayer microelectromechanical structures for material property characterization

Materials Research Society Symposium - Proceedings

Volumn 518, Issue , 1998, Pages 15-20

  Pratt, R I ^a   Johnson, G C ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; DENSITY (SPECIFIC GRAVITY); ELASTIC MODULI; ELECTROSTATICS; MECHANICAL VARIABLES MEASUREMENT; MULTILAYERS; RESONATORS; STIFFNESS;

ELECTROSTATIC COMB; MASS DENSITY; RESONANT TECHNIQUES;

MICROELECTROMECHANICAL DEVICES;

EID: 0032299320     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-518-15     Document Type: Conference Paper

References (5)