Evaluation of microfracture toughness and microcracking with notch tip radius of Si film structure for microactuator in hard disk drives

Microsystem Technologies

Volumn 7, Issue 3, 2001, Pages 91-98

  Lee, S H ^a   Kim, J S ^a   Evans, J W ^a   Son, D ^a   Pak, Y E ^b   Jeon, J U ^b   Kwon, D ^a  

^a Seoul National University   (South Korea)

^b Samsung Advanced Institute of Technology (SAIT)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0038741298     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s005420100097     Document Type: Article

References (15)

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