Single- and multi-layer electroplated microaccelerometers

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1996, Pages 168-173

  Konaka, Yoshihiro ^a   Allen, Mark G ^a  

^a MURATA MANUFACTURING CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; COPPER; ELECTRODES; ELECTROPLATING; ETCHING; FINITE ELEMENT METHOD; LITHOGRAPHY; NICKEL; ULTRAVIOLET RADIATION;

MICROACCELEROMETERS; PHOTOSENSITIVE POLYIMIDE RESIST; ULTRAVIOLET LITHOGRAPHY;

ACCELEROMETERS;

EID: 0029732764     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)