High Q spiral-type microinductors on silicon substrates

IEEE Transactions on Magnetics

Volumn 35, Issue 5 PART 2, 1999, Pages 3544-3546

  Park, Jae Y ^a   Allen, Mark G ^b  

^a LG   (South Korea)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Electroplating; High q inductor; Integrated; Micromachining; Silicon; Spiral type; Suspended

Indexed keywords

ELECTROPLATING; MICROMACHINING; SEMICONDUCTING SILICON; SUBSTRATES;

HIGH Q SPIRAL-TYPE MICROINDUCTORS;

ELECTRIC INDUCTORS;

EID: 0033183885     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/20.800584     Document Type: Article

References (5)

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