Fracture testing of silicon microelements in situ in a scanning electron microscope

Journal of Applied Physics

Volumn 63, Issue 10, 1988, Pages 4799-4803

  Johansson, Stefan ^a   Schweitz, Jan Åke ^a   Tenerz, Lars ^a   Tirén, Jonas ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 36549104881     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.340471     Document Type: Article

References (16)