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Volumn 26, Issue 8, 2006, Pages 1325-1335

Hard silicon carbonitride films obtained by RF-plasma-enhanced chemical vapour deposition using the single-source precursor bis(trimethylsilyl)carbodiimide

(10) Zhou, Yanping a,b Probst, Daniel a Thissen, Andreas a Kroke, Edwin b Riedel, Ralf a Hauser, Ralf a Hoche, Holger a Broszeit, Erhard a Kroll, Peter c Stafast, Herbert d

a DARMSTADT UNIVERSITY OF TECHNOLOGY (Germany)

b UNIVERSITY OF KONSTANZ (Germany)

c RWTH AACHEN UNIVERSITY (Germany)

d LEIBNIZ INSTITUTE OF PHOTONIC TECHNOLOGY (Germany)

Author keywords

Films; Hardness; PECVD; Si C N; Wear resistance

Indexed keywords

AMORPHOUS SILICON; ATOMIC FORCE MICROSCOPY; CARBON NITRIDE; CORROSION RESISTANCE; ELLIPSOMETRY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HARDNESS; OPTICAL MICROSCOPY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; TRIBOLOGY; WEAR RESISTANCE; X RAY DIFFRACTION;

BIS TRIMETHYLSILYL CARBODIIMIDE (BTSC); GLOW DISCHARGE OPTICAL EMISSION SPECTROSCOPY (GDOES); HARD SILICON CARBON NITRIDE FILMS;

PROTECTIVE COATINGS;

EID: 32644473022 PISSN: 09552219 EISSN: None Source Type: Journal
DOI: 10.1016/j.jeurceramsoc.2005.02.004 Document Type: Article

Times cited : (49)

References (59)

1
- 0029637640
- R. Riedel H.J. Kleebe H. Schoenfelder F. Aldinger Nature 374 1995 526
- (1995) Nature , vol.374 , pp. 526
- Riedel, R.¹ Kleebe, H.J.² Schoenfelder, H.³ Aldinger, F.⁴

2
- 0032194321
- A. Badzian T. Badzian W.D. Drawl R. Roy Diam. Relat. Mater. 7 1998 1519
- (1998) Diam. Relat. Mater. , vol.7 , pp. 1519
- Badzian, A.¹ Badzian, T.² Drawl, W.D.³ Roy, R.⁴

3
- 0028495487
- W. Zhang K. Zhang B. Wang Mater. Sci. Eng. B26 1994 133
- (1994) Mater. Sci. Eng. , vol.B26 , pp. 133
- Zhang, W.¹ Zhang, K.² Wang, B.³

4
- 0002561777
- X. Xiao Y. Li L. Song X. Peng X. Hu Appl. Surf. Sci. 156 2000 155
- (2000) Appl. Surf. Sci. , vol.156 , pp. 155
- Xiao, X.¹ Li, Y.² Song, L.³ Peng, X.⁴ Hu, X.⁵

5
- 0034836747
- X. Peng L. Song J. Meng Y. Zhang X. Hu Appl. Surf. Sci. 173 2001 313
- (2001) Appl. Surf. Sci. , vol.173 , pp. 313
- Peng, X.¹ Song, L.² Meng, J.³ Zhang, Y.⁴ Hu, X.⁵

6
- 0033690662
- K.B. Sundaram J. Alizadeh Thin Solid Films 370 2000 151
- (2000) Thin Solid Films , vol.370 , pp. 151
- Sundaram, K.B.¹ Alizadeh, J.²

7
- 0032075556
- R. Machorro E.C. Samano G. Soto L. Cata Appl. Surf. Sci. 127-129 1998 564
- (1998) Appl. Surf. Sci. , vol.127-129 , pp. 564
- Machorro, R.¹ Samano, E.C.² Soto, G.³ Cata, L.⁴

8
- 0029358127
- I. Kleps A. Angelescu F. Caccavale G. Brusatin L. Armelao Vacuum 46 1995 979
- (1995) Vacuum , vol.46 , pp. 979
- Kleps, I.¹ Angelescu, A.² Caccavale, F.³ Brusatin, G.⁴ Armelao, L.⁵

9
- 0037508693
- L.-Y. Chen F.C.-N. Hong Diamond Relat. Mater. 12 2003 968-973
- (2003) Diamond Relat. Mater. , vol.12 , pp. 968-973
- Chen, L.-Y.¹ Hong, F.C.-N.²

10
- 0037291825
- N.I. Fainer Yu.M. Rumyantsev A.N. Golubenko M.L. Kosinova F.A. Kuznetsov J. Cryst. Growth 248 2003 175-179
- (2003) J. Cryst. Growth , vol.248 , pp. 175-179
- Fainer, N.I.¹ Rumyantsev, Yu.M.² Golubenko, A.N.³ Kosinova, M.L.⁴ Kuznetsov, F.A.⁵

11
- 0035510578
- G. Marx K.-U. Koerner P. Heger Steel Res. 72 2001 518-521
- (2001) Steel Res. , vol.72 , pp. 518-521
- Marx, G.¹ Koerner, K.-U.² Heger, P.³

12
- 0034821373
- J. Wilden A. Wank M. Asmann J.V.R. Heberlein M.I. Boulos F. Gitzhofer Appl. Organomet. Chem. 15 2001 841-857
- (2001) Appl. Organomet. Chem. , vol.15 , pp. 841-857
- Wilden, J.¹ Wank, A.² Asmann, M.³ Heberlein, J.V.R.⁴ Boulos, M.I.⁵ Gitzhofer, F.⁶

13
- 0034292081
- D.-H. Kuo D.-G. Yang Thin Solid Films 374 2000 92-97
- (2000) Thin Solid Films , vol.374 , pp. 92-97
- Kuo, D.-H.¹ Yang, D.-G.²

14
- 0000087287
- (a) A. Bendeddouche A. Berjoan E. Beche T. Merle-Mejean S. Schamm V. Serin et al. J. Appl. Phys 81 1997 6147
- (1997) J. Appl. Phys , vol.81 , pp. 6147
- Bendeddouche, A.¹ Berjoan, A.² Beche, E.³ Merle-Mejean, T.⁴ Schamm, S.⁵ Serin, V.⁶

15
- 0032666223
- (b) A. Bendeddouche A. Berjoan E. Beche R. Hillel Surf. Coat. Technol. 111 1999 184-190
- (1999) Surf. Coat. Technol. , vol.111 , pp. 184-190
- Bendeddouche, A.¹ Berjoan, A.² Beche, E.³ Hillel, R.⁴

16
- 0022794731
- K. Kamata Y. Maeda M. Moriyama J. Mater. Sci. Lett. 5 1986 1051
- (1986) J. Mater. Sci. Lett. , vol.5 , pp. 1051
- Kamata, K.¹ Maeda, Y.² Moriyama, M.³

17
- 0026374593
- W. Zhang J.T. Wang Surf. Coat. Technol. 50 1991 11
- (1991) Surf. Coat. Technol. , vol.50 , pp. 11
- Zhang, W.¹ Wang, J.T.²

18
- 0033313358
- L.C. Chen K.H. Chen S.L. Wei P.D. Kichambare J.J. Wu T.R. Lu et al. Thin Solid Films 355/356 1999 112
- (1999) Thin Solid Films , vol.355-356 , pp. 112
- Chen, L.C.¹ Chen, K.H.² Wei, S.L.³ Kichambare, P.D.⁴ Wu, J.J.⁵ Lu, T.R.⁶

19
- 0033310860
- K.H. Chen J.J. Wu C.Y. Chen L.C. Chen C.W. Fan P.F. Kuo et al. Thin Solid Films 355/356 1999 205
- (1999) Thin Solid Films , vol.355-356 , pp. 205
- Chen, K.H.¹ Wu, J.J.² Chen, C.Y.³ Chen, L.C.⁴ Fan, C.W.⁵ Kuo, P.F.⁶

20
- 0029222490
- R. Riedel M. Seher J. Mayer D.V. Szabo J. Eur. Ceram. Soc. 15 1995 703
- (1995) J. Eur. Ceram. Soc. , vol.15 , pp. 703
- Riedel, R.¹ Seher, M.² Mayer, J.³ Szabo, D.V.⁴

21
- 0030778055
- W. Dressler R. Riedel Int. J. Refract. Met. Hard Mater. 15 1997 13
- (1997) Int. J. Refract. Met. Hard Mater. , vol.15 , pp. 13
- Dressler, W.¹ Riedel, R.²

22
- 0033743229
- E. Kroke Y.L. Li C. Konetschny E. Lecomte C. Fasel R. Riedel Mater. Sci. Eng. R 26 2000 97
- (2000) Mater. Sci. Eng. R , vol.26 , pp. 97
- Kroke, E.¹ Li, Y.L.² Konetschny, C.³ Lecomte, E.⁴ Fasel, C.⁵ Riedel, R.⁶

23
- 24644512620
- (ISBN 1-56677-380-6). The Electrochemical Society Inc., Pennigton, NJ, USA. Proceedings, Vol 2003-08
- Berger, C., Broszeit, E., Falk, F., Hoche, H., Kroke, E., Kroll, P. et al., Chemical Vapor Deposition XVI and EUROCVD 14, Vol 1 (ISBN 1-56677-380-6). The Electrochemical Society Inc., Pennigton, NJ, USA. Proceedings, Vol 2003-08, pp. 646-652.
- Chemical Vapor Deposition XVI and EUROCVD 14 , vol.1 , pp. 646-652
- Berger, C.¹ Broszeit, E.² Falk, F.³ Hoche, H.⁴ Kroke, E.⁵ Kroll, P.⁶

24
- 0001465013
- (a) R. Riedel E. Kroke A. Greiner A.O. Gabriel L. Ruwisch J. Nicolich et al. Chem. Mater. 10 1998 2964-2979
- (1998) Chem. Mater. , vol.10 , pp. 2964-2979
- Riedel, R.¹ Kroke, E.² Greiner, A.³ Gabriel, A.O.⁴ Ruwisch, L.⁵ Nicolich, J.⁶

25
- 0001006191
- (b) D.S. Kim E. Kroke R. Riedel A.O. Gabriel S.C. Shim J. Appl. Organomet. Chem. 13 1999 495-499
- (1999) J. Appl. Organomet. Chem. , vol.13 , pp. 495-499
- Kim, D.S.¹ Kroke, E.² Riedel, R.³ Gabriel, A.O.⁴ Shim, S.C.⁵

26
- 0035497621
- (c) Y. Iwamoto W. Völger E. Kroke R. Riedel T. Saitou K. Matsunaga J. Am. Ceram. Soc. 84 2001 2170-2178
- (2001) J. Am. Ceram. Soc. , vol.84 , pp. 2170-2178
- Iwamoto, Y.¹ Völger, W.² Kroke, E.³ Riedel, R.⁴ Saitou, T.⁵ Matsunaga, K.⁶

27
- 0001155421
- A.O. Gabriel R. Riedel S. Storck W.F. Maier Appl. Organomet. Chem. 11 1997 833
- (1997) Appl. Organomet. Chem. , vol.11 , pp. 833
- Gabriel, A.O.¹ Riedel, R.² Storck, S.³ Maier, W.F.⁴

28
- 37049110240
- J.E. Drake R.T. Hemmings E. Henderson J. Chem. Soc. Dalton Trans. 1976 366
- (1976) J. Chem. Soc. Dalton Trans. , pp. 366
- Drake, J.E.¹ Hemmings, R.T.² Henderson, E.³

29
- 21344493866
- A. Obermeyer A. Kienzle J. Weidlein R. Riedel A. Simon Z. Anorg. Allg. Chem. 620 1994 1357
- (1994) Z. Anorg. Allg. Chem. , vol.620 , pp. 1357
- Obermeyer, A.¹ Kienzle, A.² Weidlein, J.³ Riedel, R.⁴ Simon, A.⁵

30
- 0004272166
- Georg Thieme Verlag Stuttgart New York
- J. Weidlein U. Mueller K. Dehnicke Schwingungsfrequenzen 1986 Georg Thieme Verlag Stuttgart New York
- (1986) Schwingungsfrequenzen
- Weidlein, J.¹ Mueller, U.² Dehnicke, K.³

31
- 32644473489
- Dissertation, TU Darmstadt
- (a) Greiner, A., Dissertation, TU Darmstadt, 1998.
- (1998)
- Greiner, A.¹

32
- 0030997290
- (b) R. Riedel A. Greiner G. Miehe W. Dressler H. Fuess J. Bill et al. Angew. Chem. Int. Ed. Engl. 36 1997 603
- (1997) Angew. Chem. Int. Ed. Engl. , vol.36 , pp. 603
- Riedel, R.¹ Greiner, A.² Miehe, G.³ Dressler, W.⁴ Fuess, H.⁵ Bill, J.⁶

33
- 0001729645
- (c) Angew. Chem. 106 1997 657
- (1997) Angew. Chem. , vol.106 , pp. 657

34
- 0031094790
- F. Fracassi R. Lamendola Plasma Polymers 2 1997 25
- (1997) Plasma Polymers , vol.2 , pp. 25
- Fracassi, F.¹ Lamendola, R.²

35
- 32644485225
- Dissertation, University of Karlsruhe [in German]
- Lutz, H., Dissertation, University of Karlsruhe, 2001 [in German].
- (2001)
- Lutz, H.¹

36
- 0035500669
- S. Trassl G. Motz E. Roessler G. Ziegler J. Non-Cryst. Solids 293-295 2001 261
- (2001) J. Non-Cryst. Solids , vol.293-295 , pp. 261
- Trassl, S.¹ Motz, G.² Roessler, E.³ Ziegler, G.⁴

37
- 0003477452
- 2nd ed. Noyes Publications Norwich, USA Chapter 4.5
- H.O. Pierson Handbook of Chemical Vapor Deposition (CVD) - Principles, Technology and Applications 2nd ed. 1999 Noyes Publications Norwich, USA Chapter 4.5
- (1999) Handbook of Chemical Vapor Deposition (CVD) - Principles, Technology and Applications
- Pierson, H.O.¹

38
- 0003625270
- Academic Press London [chapters 2.3, 7 and 10.2.2]
- M.L. Hitchman K.F. Jensen Chemical Vapor Deposition - Principles and Applications 1993 Academic Press London [chapters 2.3, 7 and 10.2.2]
- (1993) Chemical Vapor Deposition - Principles and Applications
- Hitchman, M.L.¹ Jensen, K.F.²

39
- 0001487034
- H.-S. Park S.D. Waezsada A.H. Cowley H.W. Roesky Chem. Mater. 10 1998 2251
- (1998) Chem. Mater. , vol.10 , pp. 2251
- Park, H.-S.¹ Waezsada, S.D.² Cowley, A.H.³ Roesky, H.W.⁴

40
- 0036344455
- H. Hoche H. Scheerer R. Fritsche A. Thießen S. Flege E. Broszeit et al. Mat.-wiss. U. Werkstofftech. 33 2002 132-141
- (2002) Mat.-wiss. U. Werkstofftech. , vol.33 , pp. 132-141
- Hoche, H.¹ Scheerer, H.² Fritsche, R.³ Thießen, A.⁴ Flege, S.⁵ Broszeit, E.⁶

41
- 0003735814
- Wiley Chichester
- G. Socrates Infrared Characteristic Group Frequencies 1994 Wiley Chichester
- (1994) Infrared Characteristic Group Frequencies
- Socrates, G.¹

42
- 0032762925
- J.L. Andujar G. Viera M.C. Polo Y. Maniette E. Bertran Vacuum 52 1999 153
- (1999) Vacuum , vol.52 , pp. 153
- Andujar, J.L.¹ Viera, G.² Polo, M.C.³ Maniette, Y.⁴ Bertran, E.⁵

43
- 84967801473
- J.A. Theil J.G. Brace R.W. Knoll J. Vac. Sci. Technol. A12 1994 1365
- (1994) J. Vac. Sci. Technol. , vol.A12 , pp. 1365
- Theil, J.A.¹ Brace, J.G.² Knoll, R.W.³

44
- 0002474040
- F.J. Gomez J. Martinez J. Garrido C. Gomez-Aliexandre J. Piqueras J. Non-Cryst. Solids 191 1995 164
- (1995) J. Non-Cryst. Solids , vol.191 , pp. 164
- Gomez, F.J.¹ Martinez, J.² Garrido, J.³ Gomez-Aliexandre, C.⁴ Piqueras, J.⁵

45
- 36448999356
- Z.J. Zhang S. Fan C.M. Lieber Appl. Phys. Lett. 66 1995 3582
- (1995) Appl. Phys. Lett. , vol.66 , pp. 3582
- Zhang, Z.J.¹ Fan, S.² Lieber, C.M.³

46
- 0033361553
- J.J. Wu C.-T. Wu Y.-C. Liao T.-R. Lu L.C. Chen K.H. Chen et al. Thin Solid Films 355/356 1999 417
- (1999) Thin Solid Films , vol.355-356 , pp. 417
- Wu, J.J.¹ Wu, C.-T.² Liao, Y.-C.³ Lu, T.-R.⁴ Chen, L.C.⁵ Chen, K.H.⁶

47
- 27544493510
- J-H. Park H.-S. Kwon J-Y. Lee J. Appl. Phys. 72 1992 5246
- (1992) J. Appl. Phys. , vol.72 , pp. 5246
- Park, J.-H.¹ Kwon, H.-S.² Lee, J.-Y.³

48
- 84957284270
- M.Y. Chen X. Lin V.P. Dravid Y.W. Chung M.S. Wong W.D. Sproul Surf. Coat. Technol. 54 1992 360
- (1992) Surf. Coat. Technol. , vol.54 , pp. 360
- Chen, M.Y.¹ Lin, X.² Dravid, V.P.³ Chung, Y.W.⁴ Wong, M.S.⁵ Sproul, W.D.⁶

49
- 0027555170
- M. Ricci M. Trinquecoste F. Auguste R. Canet P. Delhaes C. Guimon et al. J. Mater. Res. 8 1993 480
- (1993) J. Mater. Res. , vol.8 , pp. 480
- Ricci, M.¹ Trinquecoste, M.² Auguste, F.³ Canet, R.⁴ Delhaes, P.⁵ Guimon, C.⁶

50
- 4244183989
- R.J. Nemanich S.A. Solin Phys. Rev. B B20 1979 392
- (1979) Phys. Rev. B , vol.B20 , pp. 392
- Nemanich, R.J.¹ Solin, S.A.²

51
- 0014829099
- F. Tuinstra J.L. Koenig J. Chem. Phys. 53 1970 1126
- (1970) J. Chem. Phys. , vol.53 , pp. 1126
- Tuinstra, F.¹ Koenig, J.L.²

52
- 0028729965
- D. Li E. Cutiongco Y.W. Chung M.S. Wong W.D. Sproul Surf. Coat. Technol. 68 1994 611
- (1994) Surf. Coat. Technol. , vol.68 , pp. 611
- Li, D.¹ Cutiongco, E.² Chung, Y.W.³ Wong, M.S.⁴ Sproul, W.D.⁵

53
- 36449009256
- A. Bousetta M. Lu A. Bensaoula A. Schultz Appl. Phys. Lett. 65 1994 696
- (1994) Appl. Phys. Lett. , vol.65 , pp. 696
- Bousetta, A.¹ Lu, M.² Bensaoula, A.³ Schultz, A.⁴

54
- 0033361829
- A. Badzian T. Badzian R. Roy W.D. Drawl Thin Solid Films 354 1999 148
- (1999) Thin Solid Films , vol.354 , pp. 148
- Badzian, A.¹ Badzian, T.² Roy, R.³ Drawl, W.D.⁴

55
- 1242306888
- J. Zhang D.S. Wavhal E.R. Fisher J. Vac. Sci. Technol. A 22 2004 201
- (2004) J. Vac. Sci. Technol. A , vol.22 , pp. 201
- Zhang, J.¹ Wavhal, D.S.² Fisher, E.R.³

56
- 0000042065
- A. Vanhulsel E. Dekempeneer J. Smeets J.P. Celis J. Vac. Sci. Technol. A17 1999 2378
- (1999) J. Vac. Sci. Technol. , vol.A17 , pp. 2378
- Vanhulsel, A.¹ Dekempeneer, E.² Smeets, J.³ Celis, J.P.⁴

57
- 0020736362
- A.C. Adams Solid State Technol. 23 1983 135
- (1983) Solid State Technol. , vol.23 , pp. 135
- Adams, A.C.¹

58
- 0019476724
- N. Wada S.A. Solin J. Wong S. Prochazka J. Non-Cryst. Solids 43 1981 7
- (1981) J. Non-Cryst. Solids , vol.43 , pp. 7
- Wada, N.¹ Solin, S.A.² Wong, J.³ Prochazka, S.⁴

59
- 84950588037
- A. Chayahara A. Masuda T. Imura Y. Osaka Jpn. J. Appl. Phys. 25 1986 L564
- (1986) Jpn. J. Appl. Phys. , vol.25
- Chayahara, A.¹ Masuda, A.² Imura, T.³ Osaka, Y.⁴

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