Plasma polymerization of fluorine alloyed amorphous carbon coatings

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 4, 1999, Pages 2378-2383

  Vanhulsel, A ^a   Dekempeneer, E ^a   Smeets, J ^a   Celis, J P ^b  

^a FLEMISH INSTITUTE FOR TECHNOLOGICAL RESEARCH VITO   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS CARBON COATING; BULK COMPOSITIONS; COATING PROPERTIES; DEPOSITION CONDITIONS; DISPERSIVE COMPONENTS; FEED GAS; HYDROPHOBIC NATURE; INDUCTIVELY-COUPLED; PLASMA-POLYMERIZED FLUOROCARBONS; POLAR COMPONENTS; PRECURSOR GAS; PROCESS PARAMETERS; RADIO FREQUENCY PLASMA; SURFACE ENERGIES; YOUNG'S MODULUS;

AMORPHOUS CARBON; ANGLE MEASUREMENT; CONTACT ANGLE; ELECTROMAGNETIC INDUCTION; FLUORINE; HARDENING; INFRARED SPECTROSCOPY; INTERFACIAL ENERGY; MECHANICAL PROPERTIES; PLASMA DEPOSITION; PLASMA POLYMERIZATION; PLASMAS; POLYMER BLENDS; SURFACE CHEMISTRY; X RAY PHOTOELECTRON SPECTROSCOPY;

COATINGS;

EID: 0000042065     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581775     Document Type: Conference Paper

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